Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels
We propose a concept of a flexible sensor array using a novel capacitive force sensor not having a vulnerable electrode on the force applied site.It has a polymer domed structure inside which silicone oil is contained.When the force is applied, the oil is pushed into the surrounding thin channels, where the change in capacitance due to the Plastic